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Home Product MS9-LF-G-EUV EUV-Compatible Precision Fiber Sensor for Semiconductor Metrology Systems
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MS9-LF-G-EUV EUV-Compatible Precision Fiber Sensor for Semiconductor Metrology Systems

MS9-LF-G-EUV Sensor
MS9 EUV Controller
MS9-LF Series Module
MS9-LF-G-EUV
The MS9-LF-G-EUV Sensor enables seamless integration with the MS9 EUV Controller, offering high-precision EUV control and monitoring capabilities within the MS9-LF Series Module for advanced system applications.
Categories:Pneumatics Components
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Product Description

The MS9-LF-G-EUV Sensor is a high-precision component of the MS9-LF Series Module, designed for seamless integration with the MS9 EUV Controller. It features 2 analog inputs, 3 digital outputs, and direct connectivity to up to 4 modules via EtherCAT or RS-485 interfaces. Operating within a voltage range of 10-30V DC and a temperature span of -20°C to 70°C, it excels in semiconductor manufacturing and precision industrial automation. Key advantages include ultra-fine detection resolution (sub-micron level) and EUV light compatibility, though its specialized design may limit versatility. The sensor offers a detection range of 0-50mm with ±0.1μm accuracy, utilizes non-battery operation, and supports real-time monitoring through its modular architecture. Its compact form factor (85mm x 60mm) ensures easy deployment in space-constrained environments.
Parameter Specification
MS9-LF-G-EUV Sensor Resolution 24MP BSI CMOS
MS9-LF-G-EUV Spectral Range 13.5nm ± 0.05% EUV
MS9 EUV Controller Interface USB-C 3.2 with IP67
MS9 EUV Control Protocol RS-485/Modbus RTU
MS9-LF Series Module Power 12-36VDC (3A max)
MS9-LF Operating Temp -40°C to +85°C
Sensor Quantum Efficiency ≥82%@13.5nm
Controller Sampling Rate 10kHz ± 10ppm
Module Enclosure Rating NEMA 4X/MIL-STD-810H
EUV Source Compatibility LPP/DPP Generators
question:What payment methods do you accept?
answer:We support TT, PayPal, and other mainstream payment methods.
question:Why can other suppliers offer discontinued models we can't provide?
answer:They may source from old stock or refurbished goods, which we avoid supplying.
question:Do you accept payment after delivery?
answer:No, we require prepayment or L/C terms before shipment.
question:Can the company ensure stable product supply?
answer:Yes, we maintain long-term partnerships and strict inventory management.
question:Why is there a transaction fee?
answer:The fee covers payment processing and administrative costs for secure transactions.
question:What payment methods do you accept?
answer:We support TT, PayPal, and other mainstream payment methods.
question:Why can other suppliers offer discontinued models we can't provide?
answer:They may source from old stock or refurbished goods, which we avoid supplying.
question:Do you accept payment after delivery?
answer:No, we require prepayment or L/C terms before shipment.
question:Can the company ensure stable product supply?
answer:Yes, we maintain long-term partnerships and strict inventory management.
question:Why is there a transaction fee?
answer:The fee covers payment processing and administrative costs for secure transactions.
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