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Home Product MS6-LF-1/2-EUV EUV-Resistant Pneumatic Valve, Vacuum Grade, 1/2" Port for Semiconductor Lithography
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MS6-LF-1/2-EUV EUV-Resistant Pneumatic Valve, Vacuum Grade, 1/2" Port for Semiconductor Lithography

MS6-LF-1/2-EUV valve
EUV solenoid valve 1/2 inch
LF series pneumatic control valve
MS6-LF-1/2-EUV
The MS6-LF-1/2-EUV valve is a 1/2 inch LF series pneumatic control valve designed for EUV applications. This compact EUV solenoid valve ensures precise flow regulation in extreme ultraviolet lithography systems. (197 characters)
Categories:Pneumatics Components
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Product Description

The **MS6-LF-1/2-EUV valve** is a high-performance **EUV solenoid valve 1/2 inch** designed for precision pneumatic control in demanding industrial environments. Part of the **LF series pneumatic control valve** lineup, it operates within a voltage range of 12-24V DC and supports a temperature range of -20°C to +80°C, ensuring reliability in extreme conditions. This valve features a 1/2-inch port size, direct compatibility with standard pneumatic modules, and IP65-rated protection for dust and moisture resistance. It integrates seamlessly with industrial automation systems via digital or analog interfaces, making it ideal for semiconductor manufacturing, automotive, and robotics. Constructed with corrosion-resistant materials, it offers rapid response times, low power consumption, and minimal maintenance. Applications requiring ultra-clean environments, such as EUV lithography, benefit from its specialized design. Not applicable for battery capacity, screen size, or detection distance parameters, this valve prioritizes compactness, durability, and precise flow control.
Parameter Specification
Valve Type EUV Solenoid Valve
Series LF Series Pneumatic Control Valve
Model Number MS6-LF-1/2-EUV
Port Size 1/2 inch NPT
Operation Direct Acting
Voltage 24VDC ±10%
Pressure Range 0.1 - 1.0 MPa
Media Ultra-pure Gases/Clean Air
Temperature -20°C to +80°C
Body Material 316 Stainless Steel
Seal Material FKM (EUV Grade)
IP Rating IP67
Certification SEMI F47 Compliant
Connection Glandless ISO-KF Flange
Weight 1.8 kg
question:Can shipments apply for low value declaration?
answer:Yes, we can process low value declarations for eligible shipments under applicable regulations.
question:Do you offer upgraded or alternative models?
answer:Yes, we provide upgraded or compatible alternative models based on availability and client needs.
question:Do you provide technical selection services?
answer:Yes, our engineering team offers technical guidance to help select suitable product specifications.
question:Can the company ensure stable product supply?
answer:Yes, we maintain long-term partnerships and strict inventory management.
question:Why is there a transaction fee?
answer:The fee covers payment processing and administrative costs for secure transactions.
question:Can shipments apply for low value declaration?
answer:Yes, we can process low value declarations for eligible shipments under applicable regulations.
question:Do you offer upgraded or alternative models?
answer:Yes, we provide upgraded or compatible alternative models based on availability and client needs.
question:Do you provide technical selection services?
answer:Yes, our engineering team offers technical guidance to help select suitable product specifications.
question:Can the company ensure stable product supply?
answer:Yes, we maintain long-term partnerships and strict inventory management.
question:Why is there a transaction fee?
answer:The fee covers payment processing and administrative costs for secure transactions.
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